Manual PDMS microchannel
Work as much as possible in clean environment, under the flow hood.
Masking Films For HF Etching
List of various films and their resistance to HF
SU-8 Process Tips
SU-8 is a high contrast, epoxy based photoresist designed for micromachining and other microelectronic applications, where a thick chemically and thermally stable image is desired.
Dimensions Related To HF Etching
Considerations on etched cross section and mask design
SU-8 molding and PDMS casting process
Making PDMS microfluidic devices through casting on SU-8 molds
Etch Rates for Micromachining Processing
Samples of materials for MEMS and IC processes are prepared and etched in different etches.
Microchannel with rectangular cross section
This document lists the hydraulic resistance for channels with rectangular cross section.
Wet Etching of Bulk silicon
Recipes, Tricks, What is Possible, and What is Impossible
Etching Processes for Microfluidics
Lists the sample etching processes during the microfluidic developments